摘要硅微谐振梁加速度计是一种新型的传感器。其以准数字信号作为输出，具有精度高、可靠性好、抗干扰等优势，成为近年来微传感器的研究热点。由于谐振梁加速度计的性能优越，其广泛应用于军工、民用的各个领域，对其在大量程、高性能方面的要求也与日俱增。因此，谐振梁加速度计大量程非线性的理论与试验研究十分必要。

论文首先在谐振梁力学分析的基础上，建立了谐振梁加速度计大量程非线性的理论模型，分析了非线性的影响因素。其次，采用Ansys软件对谐振梁加速度计进行大量程非线性的模态分析和仿真计算，得到非线性仿真值与理论值的误差为13%。最后，完成了重力场1g静态翻滚试验和高g精密离心机试验，根据试验结果建立了谐振梁加速度计的非线性模型。同时，论文针对谐振梁加速度计大量程非线性的影响因素,提出了改进措施,包括提高加工精度，严格控制谐振梁宽度的加工误差；改进频率数据的处理方法，即谐振器频率的平方差分运算。68295

毕业论文关键词  谐振梁加速度计  谐振梁  非线性   模态分析

毕业设计说明书（论文）外文摘要

Title  Theoretical and Experimental Research on the large-scale  nonliear characteristics of resonant beam accelerometer

Abstract

Silicon micro-resonant beam accelerometer is a new sensor. It outputs  quasi-digital signal. With high accuracy, reliability, interference and other advantages, it becomes a hot topic micro-sensors in recent years. Due to the superior performance of resonant beam accelerometer, it is widely used in military and civilian fields. The requirements of its large scale and high performance are also increasing. Therefore, theoretical and experimental study of the large-scale nonlinear characteristics is very necessary.

Based on the mechanical analysis on resonant beam, this paper firstly established a large-scale nonlinear theoretical model of the resonant beam accelerometer and analyzed the nonlinear factors. Secondly, ANSYS software was used to modeling and simulating for specific examples of resonant beam accelerometer, figuring out that the error of nonlinearity between the simulation value and the theoretical valve was 13%. Finally, the 1g static rollover test in gravitational field and the high g precision centrifuge test were accomplished. According to the test results, a practical nonlinear model of resonant beam accelerometer was constructed. Meanwhile, aiming at the large-scale nonlinear factors, this paper proposed improvement measures, including increasing machining precision, such as strictly controlling the accuracy of the resonant beam width; and improving frequency data processing methods, which is the differential operation for the squared resonant frequency.

Keywords  Resonant beam accelerometer，resonant beam，nonlinear，modal analysis

目   次

1 绪论 1

1.1 谐振梁加速度计概述 1

1.2 国内外研究现状 1

1.2.1 国外研究现状 1

1.2.2 国内研究现状 3

1.3 本课题研究的目的与意义 4

1.4 论文主要工作 4

2 谐振梁加速度计的工作原理