基于薄膜体声波谐振传感器的生化检测技术研究
关键词 薄膜体声波谐振器 FBAR振荡器 MBVD模型 生化检测
毕业设计说明书（论文）外文摘要
Title Research of Biochemical Detection Based on Film Bulk Acoustic Resonators (FBAR)
Abstract
Along with the environmental problems and biomedical research becoming
increasingly prominent, biochemical substances quality testing has become an
important accurate research hot spot. Compared with quartz crystal microbalance, film
bulk acoustic resonators (FBAR) biosensor has the advantage of high sensitivity and
could be integrated with RFIC and MMIC. The basic principle and structure of the
FBAR as well as the quality of the biosensor’s principle and research progress are
introduced. Mason model, BVD model and MBVD model are built. Their advantages
and disadvantages are compared. FBAR’s MBVD model is established in software
ADS2009. Through testing the practical device, corresponding model parameters of the
model are achieved, then simulate in ADS and get ideal simulation results.
This paper introduces FBAR resonators and builds three point oscillator circuits. In
ADS with S parameters simulation, the harmonic balance simulation, the transient
simulation, an oscillator is successfully built. Then the PCB of FBAR resonator is
shown. By testing the output wave of resonator, it can test micro mass.
This paper puts forward the detection signal circuit design and calculation methods for
the next step of completing biochemical detection circuit.
Keywords FBAR resonator MBVD model Biochemistry detection
目录
1 绪论 1
1.1 研究背景 1
1.2 FBAR 概述 1
1.2.1 FBAR 应用现状 1
1.2.2 FBAR 工作原理 2
1.2.3 FBAR 典型结构 2
1.3 FBAR 生化检测技术研究现状 5
1.3.1 现有生化检测技术 5
1.3.2 FBAR 的物质检测研究现状 6
1.4 小结 7
2 FBAR 建模与仿真 7
2.1 Mason等效电路模型 8
2.2 BVD和MBVD等效电路模型 10
2.3 Mason模型和 BMVD模型的比较 12