氮化硼异质结的光电探测器
毕业论文关键词 石墨烯 氮化硼 异质结 光电探测器 量子隧道效应
Title photodetectors that based on boron nitride heterojunctionAbstractIn today's technological advances, the general trend of the development of variouselectronic devices are miniaturized,the development of optical detectors alsoconform to this trend of miniaturization.Prospects of microelectronic devicesminiaturization in this direction is very broad.Only atomic layer graphenecrystals have excellent physical properties;BN-ene is excellent dielectric onlylayer of atoms, atomic-level flat surface.Tthe mismatch of graphene and BN-eneis small.In this study, only one graphene atomic layer combined with the boronnitride-ene into nano light detector, the thickness may reach only tens ofnanometers, which can make the volume of the photodetector to the nanometer level.This paper describes a method using a wet transfer Transfer graphene and BN-enefilm stacked on each other by way of successfully prepared G / BN / G lightdetectors,And using an optical microscope, AFM, SEM and a series of testinstruments to observe the morphology and electrical properties and opticalproperties of graphene, boron nitride and the detector.This experiment use theAFM measured boron nitride thickness of about 1nm .We use UV - visible absorptionspectrum of the resulting boron nitride ultraviolet light absorption maximum 203nm, whereby hexagonal boron nitride band gap width of 5.97eV, and use BN can opengraphene a band gap.This experiment tested the electrical properties of boronnitride based detectors obtained I-V curve , in line with its trend ofFowler-Nordheim tunneling theory, at low voltage, current density and voltagerelationship is linear, voltage at higher current density and the square of thedensity of the voltage is linear.
Keywords Graphene BN Heterojunction Photodetector Quantum tunnel effect
目录
1研究背景2
1.1氮化硼的结构、性质及制备方法2
1.1.1氮化硼的结构.2
1.1.2氮化硼的性质.3
1.1.3氮化硼的制备方法.3
1.2石墨烯的结构、性质..6
1.3研究的意义.7
1.4研究方法..8
2实验过程9
2.1氮化硼的制备过程9
2.2石墨烯与氮化硼的转移..11
2.3氮化硼基光探测器的制备15
3材料及器件的表征..17
3.1石墨烯的表征17
3.1.1长有石墨烯宏观铜箔形貌..17
3.1.2显微镜下石墨烯的形貌特征.17
3.2氮化硼的表征18
3.2.1生长有氮化硼薄膜的铜箔宏观形貌18
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