金属光栅结构的表面等离子体共振传感器的设计及其特性研究
毕业论文关键词： 表面等离子体共振 金属光栅 共振光谱 严格耦合波分析法
Title design and characterization study of surface plasmon resonance sensor based on metal grating structure
Abstract Since the surface plasmon resonance phenomenon had been discovered in the early twentieth century， surface plasmon optics has been developed rapidly. And the surface plasmon resonance (Surface Plasmon Resonance, SPR) sensor which is based on this phenomenon has been widely applied in environmental monitoring, health care. As a new sensor, SPR sensors reflect the changes of the refractive index of the metal surface by monitoring the formant position to analyze material properties. At present the main research work is obtain the optimal structure parameters to improve the sensor sensitivity by research how the SPR sensor structure parameters influence the resonant characteristics, in this paper, based on the metal grating coupled resonance sensor, We change the structure parameters of metal grating to get a high sensitivity grating coupler sensor . This thesis is based on surface plasmon resonance theory and rigorous coupled-wave analysis method (RCWA), applies Rsoft simulation software to simulate the metal (Au) grating, change the parameters of grating structure to obtain the metal Au gratings’ characteristic curves at different structural parameters of SPR resonance sensing , and then analyzes the influence of the different structural parameters on the sensitivity of surface plasmon resonance. This paper analyzes the influence of the grating depth and width ratio on the resonant to obtain the grating structure parameters grating when getting a maximum depth of SPR resonance. in this thesis we obtain the sensitivity of Au metal gratings is 203.4 °/ RIU, higher than the literature [31] of 173.3 °/ RIU. Finally, we also have simulated the SPR resonance curve of Ag which has the same grating parameters of the structure as the metal grating coupler sensor (Au), then comparing Ag and Au’ SPR resonance depth.
Keywords： surface plasmon resonance metal grating Resonance Spectroscopy rigorous coupled-wave analysis method