摘要近年来，自由曲面元件以其无可替代的光信息转换特点已成为光学系统设计中的一种重要元件。自由曲面复杂的面形和其非旋转对称性使得高精度自由曲面面形检测十分困难，而大口径、高斜率的自由曲面更是加大了检测的难度。本文探究了一种新型的基于点源阵列的非零位干涉检测仪的标定原理，研制了该干涉仪的标定系统，包括六维精密机械定位结构、标定系统在线控制软件、标定球及其装夹结构；设计并执行了系统所用的六维调整架和在线控制软件的检测方案。该标定系统能全口径标定60mm口径的标准球，而其定位精度达0.32μm、0.54″，且通过软件实现了该标定系统的实时在线控制。63732

毕业论文关键词  自由曲面  非零位干涉  六维标定系统  在线自动控制

毕业设计说明书（论文）外文摘要

Title  Design and Manufacture of the Calibration System of a     Non-null Interferometer Based on Point Source Array 

Abstract

In the last years,freeform surfaces have grown to become a key element in the design of optical systems for its irreplaceable optical transforming speciality.The complicated shape and the non-rotational symmetry of freeform surfaces make it hard for the precision freeform surface testing ,while we'll face much more difficulties when it comes to the large-aperture,high-gradient freeform surface testing.This work analyses  the principle of the calibration system of a newly presented interferometer operating in a non-null test based on point source array,and then designs and manufactures the calibration system,including the six-dimensional precision mechanical positioning structure,the online controlling software of the calibration system and the standard calibration spheres and their mechanical clamping structures;a solution of testing the six- dimensional adjusting bracket and the online controlling software used in the system is designed and carried out .This calibration system can be used in full-aperture testing of the standard sphere,of which the diameter is up to 60mm ,with the positioning accuracy of 0.32μm，0.54″，and the system is online automatically controlled by the software designed.

Keywords   freeform surface   non-null test   six-dimensional calibration system   online automatic controlling

1  引言 1

1.1  研究背景 1

1.2  自由曲面检测技术的国内外发展现状 2

1.3  本文主要工作 9

1.4  本章小结 9

2  基于点源阵列的非零位干涉系统的基本原理 10

2.1  非零位干涉斜率检测原理 10

2.2  基于点源阵列的非零位干涉系统的系统结构 11

2.3  基于点源阵列的非零位干涉系统的标定原理 14

2.4  本章小结 15

3  基于点源阵列的非零位干涉仪的标定系统的研制 17

3.1  标定系统的设计要求 17

3.2  六维精密机械定位结构的研制 17

3.3  标定系统在线控制软件的研制 20

3.4  标定球及其装夹结构的研制 25

3.5  本章小结 31

4  标定系统的检测